:::: 동원하이텍 ::::

[UNI-LID G.D.P]
	Product Name	:	UNI-LID G.D.P
			(133 Hole / 101 Hole / 80 Hole / 13Hole)
	Specification	:	Aluminium + Anodize
	Vendor No	:	0020-31493 / 0020-31492 / 0020-33786

[PEDESTAL]
	Product Name	:	PEDESTAL (METAL / POLY / OXIDE )
	Specification	:	Aluminium + Sulfuric Acid Anodize, Oxalic
			Acid Anodize
	Vendor No	:	0010 - 31940 / 0010 - 09597 / 0020 - 10542

[CVD SHOWER HEAD(TEOS)]
	Product Name	:	CVD SHOWER HEAD(TEOS)
	Specification	:	Aluminium + Anodize + Ni
	Vendor No	:	0020 - 10117 / 0020-34121

[Chamber 8" & 6"]
	Product Name	:	Chamber 8" & 6"
	Specification	:	Aluminium
	Vendor No	:	0040 - 09094 / 0040-09286

[Chamber Wall (R2)]
	Product Name	:	Chamber Wall (R2)
	Specification	:	Aluminium + Anodize
	Vendor No	:	0040-09893

[SGD. LID. Ass'y]
	Product Name	:	SGD. LID. Ass'y
	Specification	:	Aluminium + Ni + Anodize
	Vendor No	:	0240 - 32910

[Chamber Liner]
	Product Name	:	Chamber Liner
	Specification	:	Aluminium + Anodize + Ni
	Vendor No	:	0020-34694

[Cathode Liner ]
	Product Name	:	Cathode Liner
	Specification	:	Aluminium + Anodize
	Vendor No	:	0020-34695

[Slit door]
	Product Name	:	Slit door
	Specification	:	Aluminium + Anodize
	Vendor No	:	0020-19002

[Slit Valve]
	Product Name	:	Slit Valve(METAL/BUFFER)
	Specification	:	Aluminium + Anodize + Ni(METAL)
	Vendor No	:	0020-76301/0020-19003