|
NO
|
VENDOR
|
Part NO.
|
Description of Goods
|
Process Name
|
Model of Machine
|
Material
|
|
1
|
AMAT
|
0020-03379
|
UNI-LID G..D.P(101hole)
|
ETCHER
|
C-5200
|
AL6061
|
|
2
|
AMAT
|
0020-31493
|
UNI-LID G..D.P(133hole)
|
ETCHER
|
C-5200
|
AL6061
|
|
3
|
AMAT
|
0010-09597
|
PEDESTAL(POLY)
|
ETCHER
|
P-5000
|
AL6061
|
|
4
|
AMAT
|
0010-10542
|
PEDESTAL(OXIDE)
|
ETCHER
|
P-5000
|
AL6061
|
|
5
|
AMAT
|
0010-31940
|
PEDESTAL(METAL)
|
ETCHER
|
P-5000
|
AL6061
|
|
6
|
AMAT
|
0240-32910
|
GSD LID ASS'Y
|
ETCHER
|
P-5000
|
AL6061
|
|
7
|
AMAT
|
0020-31739(R1)
|
GARRIER ESC FOCUS RING
|
ETCHER
|
C-5200
|
AL6061
|
|
8
|
AMAT
|
0040-09286
|
CVD 8" CHAMBER
|
CVD
|
P-5000
|
AL6061
|
|
9
|
AMAT
|
0040-09094
|
CVD 8" CHAMBER
|
CVD
|
C-5200
|
AL6061
|
|
10
|
AMAT
|
0040-09893
|
CHAMBER WALL(R2)
|
ETCHER
|
C-5200
|
AL6061
|
|
11
|
AMAT
|
0020-19003
|
SLIT VALVE (BUFFER) LINER
|
ETCHER
|
C-5200
|
AL6061
|
|
12
|
AMAT
|
0020-76301
|
SLIT VALVE (METAL)
|
ETCHER
|
C-5200
|
AL6061
|
|
13
|
AMAT
|
0040-09723
|
CHAMBER WALL
|
ETCHER
|
P-5000
|
AL6061
|
|
14
|
LAM
|
715-11531-008
|
LAM, CATHODE 6"
|
ETCHER
|
4400/4600
|
AL6061
|
|
15
|
LAM
|
715-11531-009
|
LAM,CATHODE 8"
|
ETCHER
|
4400/4600
|
AL6061
|
|
16
|
LAM
|
715-11640-006
|
FOCUS RING 6"
|
ETCHER
|
4400/4600
|
AL6061
|
|
17
|
LAM
|
715-07025-001
|
AUTO ETCH
|
ETCHER
|
4400/4600
|
AL6061
|
|
18
|
LAM
|
715-02887-005
|
SHROUD
|
ETCHER
|
4400/4600
|
AL6061
|
|
19
|
LAM
|
715-028552-001
|
UPPER ELECTRODE RING
|
ETCHER
|
4400/4600
|
AL6061
|
|
20
|
TEL
|
1D10-101475-11
|
PLATE BAFFLE
|
ETCHER
|
DRM
|
AL6061
|
|
21
|
TEL
|
1D10-201429-15
|
UPPER ELECTRODE 8"
|
ETCHER
|
DRM
|
AL6061
|
|
22
|
TEL
|
2187-026238-11
|
MANIFOLD(NIT, TEOS)
|
DIFFUSION
|
TEL EQUIPMENT
|
SUS316
|
|
23
|
TEL
|
HDL98-120802
|
BALL JOINT CLAMP
|
DIFFUSION
|
TEL EQUIPMENT
|
SUS316
|
|
24
|
NOVELLUS
|
16-033931-00
|
WELD SHOWER HEAD
|
CVD
|
CONCET 1
|
AL6061
|
|
25
|
NOVELLUS
|
16-033933-00
|
WELD SHOWER HEAD
|
CVD
|
CONCET 1
|
AL6061
|
 |